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To offer and create new value from complex customer requesting within fast-paced
semiconductor industry, we rush on developing equipment and devices for next generation production process.
Also, through multiple national tasks performing, we are constantly make our effort to build
strong IT technical competitiveness not only in semiconductor industry.
Therefore via create the world best technology, will get into tech-leading company in the future,
moreover strongly eager to contribute for high-tech semiconductor industry.

  • Prevention from depositing the un-expected films. (#10-1147192)
  • Gas saving system. (#10-1147191)
  • Multi-functional Load Port. (#10-2012-0048542)
  • Post-Purge System. (#10-1366135)