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Hybrid Load-Port & EFEM
Handling 200mm open cassette at 300mm wafer Load-Port, Auto-Switching without the mechanical changes.
Handling 200mm open cassette at 300mm wafer Load-Port,
Auto-Switching without the mechanical changes.
- Easy Retrofit in FAB. - Preventing mechanism of wafer protrusion and for incorrect pick-up. - Wafer mapping function.