Introduction

Vaccum Handling Sytems

RECIF Technologies history started in 1982 offering its first wafer handling solution: Vacuum Handling Systems.
Based on this historical technical mastery, Recif Technologies provides today a full range of single wafer
manual vacuum handling solutions adapted to our customers’ and current Semiconductor industry’s’ requirements.
  • The highest level of cleanliness and safety
  • Manual single wafer handling from 100mm to 450mm
  • Our patented vacuum tip design
  • The use of clean organic material
  • A true ESD protection
Specification

VACUUM TIPS - EI

  • 450mm wafers : EI90 (SD* or non SD*)
  • 300mm wafers : EI50 (SD*)
  • 200mm wafers : EI30 (SD* or non SD*)
  • 150mm wafers and below : EI14 (SD* or non SD*)

  • Minimum contact with the wafer
  • Prevention of wafer deformation
  • Wafer safety
  • Optional High impedance range (SD*) for true ESD protection

  • Manufactured from PEEK (Ca30 or dissipative as option)
  • Conductive with optional high impedance solutions (SD*)
  • Up to 315°C process compliant
  • Angled 10° & 30° option

SD* stands for Static Dissipative

VACUUM WAND - VSNOSD

  • Robust
  • Manufactured from PVDF* + Carbon fibers
  • Normally open design (Operator activates the spring valve to cut the vacuum)
  • ESD safe (Conductive)
  • Screw fit vacuum tube connection
PVDF* : polyvinylidene fluoride

VACUUM TUBES - (C)TSSD

  • 2m length coiled tube manufactured from Polyurethane (Part# CTSSD)
  • 1.8m or 3.0m length straight tube manufactured from Silicone Rubber(Part# TSSD)
  • Conductive (ESD safe)
  • Internal stainless steel spring prevents vacuum cut-off & ESD events
  • Supplied with standard stainless steel ¼’’ connector (6.35mm)

STANDS - SPCH/V

  • Manufactured from PVDF*
  • Automatic vacuum cut-off system
  • SPCH for table mount
  • SPCV for wall mount

QUICK-DISCONNECT - QDC

  • Manufactured from PVDF & carbon fibers
  • Conductive
PVDF* : polyvinylidene fluoride

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Company : LSTEC co., Ltd / CEO : BH Kim / Business license : 129-86-48857
Address :(16827) 767, Sinsu-ro, Suji-gu, Yongin-si, Gyeonggi-do, Republic of Korea
TEL : 031-719-8872 / FAX : 031-8039-4565 / MAIL : yjyu@lstec.kr

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