Introduction

300mm Wafer Sorter

The G5+ series, latest generation of COMPACT sorters from RECIF Technologies, is the standard solution for 300mm
silicon wafers sorting.
The G5+ offers fast throughput thanks to the alignment/OCR function embedded on the handling robot.
End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through
our proprietary ACT (Advanced Contact Technology).
It also provides the highest throughput ever achieved with a single robot, the smallest footprint and
unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.
The RECIF Technologies G5+ 300mm Wafer Sorter is providing IC manufacturers the ultimate productivity solution for
7 nm nodes and beyond.

The G5+ sorter offers:
  • - Advanced PWP front face performance < 0.0049 @ 26nm*
  • - End effector: 3 points backside Advanced Contact Technology as standard configuration
  • - ISO Class 1 mini-environment
  • - SEMI300 standards compliant
  • - 2 or 4 Load Ports configuration
  • - Integration into stocker (2 or 4 LP)
  • - Compatible with all SEMI compliant FOUP/ FOSB types
  • - New side casing for optional handling features
* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined
Video
Specification

Company : LSTEC co., Ltd / CEO : BH Kim / Business license : 129-86-48857
Address :(16827) 767, Sinsu-ro, Suji-gu, Yongin-si, Gyeonggi-do, Republic of Korea
TEL : 031-719-8872 / FAX : 031-8039-4565 / MAIL : yjyu@lstec.kr

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