300mm Wafer Sorter
The G5+ series, latest generation of COMPACT sorters from RECIF Technologies, is the standard solution for 300mm
silicon wafers sorting.
The G5+ offers fast throughput thanks to the alignment/OCR function embedded on the handling robot.
End Effector design features ensure unsurpassed cleanliness, as well as a highly secure wafer handling through
our proprietary ACT (Advanced Contact Technology).
It also provides the highest throughput ever achieved with a single robot, the smallest footprint and
unsurpassed cleanliness demonstrated, as well as extremely secure wafer handling.
The RECIF Technologies G5+ 300mm Wafer Sorter is providing IC manufacturers the ultimate productivity solution for
7 nm nodes and beyond.
The G5+ sorter offers:
* Based on 1000 cycles test per wafer - Tool configuration, clean room environment and FOUP/ FOSB type to be defined
- - Advanced PWP front face performance < 0.0049 @ 26nm*
- - End effector: 3 points backside Advanced Contact Technology as standard configuration
- - ISO Class 1 mini-environment
- - SEMI300 standards compliant
- - 2 or 4 Load Ports configuration
- - Integration into stocker (2 or 4 LP)
- - Compatible with all SEMI compliant FOUP/ FOSB types
- - New side casing for optional handling features