Indroduction

Hybrid Load-Port

(300/200mm Wafer Auto Switching Load Port)
200mm Wafer is available by just setting Open Cassette Adapter on 300mm Wafer LP.
  • 300/200mm Wafer mapping function (No Change Required)
  • Preventing mechanism for wafer protrusion.
  • Safety lock function to keep adapter door close when wafer is being transported.


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Company : LSTEC co., Ltd / CEO : BH Kim / Business license : 129-86-48857
Address :(16827) 767, Sinsu-ro, Suji-gu, Yongin-si, Gyeonggi-do, Republic of Korea
TEL : 031-719-8872 / FAX : 031-8039-4565 / MAIL : yjyu@lstec.kr

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