Indroduction
Hybrid Load-Port
(300/200mm Wafer Auto Switching Load Port)
200mm Wafer is available by just setting Open Cassette Adapter on 300mm Wafer LP.
- 300/200mm Wafer mapping function (No Change Required)
- Preventing mechanism for wafer protrusion.
- Safety lock function to keep adapter door close when wafer is being transported.
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